BITS Pilani

  • Page last updated on Thursday, July 30, 2020

Clean Room: Micro and Nano Fabrication Facility

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Major cleanroom facilities.

BITS Pilani Hyderabad campus established state of the art facilities for Micro and Nano semiconductor device fabrication and characterization. The size of clean room is 581 sq. f and 80% of it is maintained as (ISO 6) class 1000 and the rest is class 100 (ISO 5). Complete class 100 area covered with yellow light and dedicated for Lithography process.

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An Institution Deemed to be University estd. vide Sec.3 of the UGC Act,1956 under notification # F.12-23/63.U-2 of Jun 18,1964

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