BITS Pilani

  • Page last updated on Wednesday, October 03, 2018

Clean Room: Micro and Nano Fabrication Facility

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Clean Room

A state of the art clean room facility has been commissioned at BITS Pilani, Hyderabad Campus on August 6th, 2017. The facility is located in the E-Block room number-209. Two classes of clean room have been made to function, namely, Class 100 (ISO–5) and Class 1000 (ISO–6). The classification of the clean room environment is based on the number density of micron sized particles present in the environment. The working area for each of these classes is 159 sq.ft. and 412 sq.ft. respectively. Out of these two environments, the Class 100 facility has also been converted into a yellow room which is required for photo-lithography process. The facility holds basic equipment that is required for any nano and micro fabrication process.

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